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Chemical Vapor Deposition Equipment
AMAT P5000 - PE Oxide Dep 6" - ID177729
AMAT P5000 - PE Oxide Dep Tool
2 DxZ Chamber - Both PE - Silane 6" Si
Currently Installed in Fab, Good Working Condition
Aviza Celsior mainframe - ID137544
Aviza Celsior mainframe
Equipment Code: CVD304-04
Aviza Pantheon Mainframe - ID137540
Aviza Pantheon Mainframe
Equipment Code: CVD304-03
Furnace TEL Minibatch (NITRID) - ID137566
OfenTel Minibatch (NITRID)
Equipment Code: OFE361-01
FurnaceTel Minibatch (OXID) - ID137567
OfenTel Minibatch (OXID)
Equipment Code: OFE361-02
TEL Trias TI/TiN-ALD - ID137543
TEL Trias TI/TiN-ALD
Equipment Code: CVD314-01
TEL Trias TI/TiN-ALD - ID137546
TEL Trias TI/TiN-ALD
Equipment Code: CVD314-02
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