top of page
Chemical Vapor Deposition Equipment

AMAT P5000 - PE Oxide Dep 6" - ID177729
AMAT P5000 - PE Oxide Dep Tool
2 DxZ Chamber - Both PE - Silane 6" Si
Currently Installed in Fab, Good Working Condition

Aviza Celsior mainframe - ID137544
Aviza Celsior mainframe
Equipment Code: CVD304-04

Aviza Pantheon Mainframe - ID137540
Aviza Pantheon Mainframe
Equipment Code: CVD304-03

Furnace TEL Minibatch (NITRID) - ID137566
OfenTel Minibatch (NITRID)
Equipment Code: OFE361-01

FurnaceTel Minibatch (OXID) - ID137567
OfenTel Minibatch (OXID)
Equipment Code: OFE361-02

TEL Trias TI/TiN-ALD - ID137543
TEL Trias TI/TiN-ALD
Equipment Code: CVD314-01

TEL Trias TI/TiN-ALD - ID137546
TEL Trias TI/TiN-ALD
Equipment Code: CVD314-02
​
​
Please reload
bottom of page