Semi Automated Wet Benches

FMAL Project

SAT Semi-Automated FMAL Wet Benches* are designed, manufactured and dedicated to make decapping and attacks in solution of electronic devices in “Failure and Material Analysis Laboratory”. FMAL Wet Benches* are born to perform precision dosing and handling in a controlled environment of small quantities of process fluids even at high corrosivity and toxicity. FMAL Wet Benches* are able to ensure the maintenance of the high purity of the fluids assayed, the safety of operators and the work environment. They have ability to adapt to various types of fluids, of operations to perform, and applications in general.

 

The FMAL Wet Benches are designed for the automated dosing and handling of limited amounts of highly precise chemicals, that are extremely aggressive and toxic, with particular reference, but not limited, to ultrapure fluids used in the semiconductor industry.

They are able to ensure the maintenance of the high purity of the dosed fluid, the safety of operators and the work environment, the ability to adapt to various types of fluids, of operations to perform, and applications in general.

 

FMAL Wet Benches consist of:

  • A structure specifically designed to enable the preparation of all the devices to realize the integrated solution.

  • A distribution system and dosing of chemicals, consisting of several independent transfer fluid lines, each line consisting of piping, fittings, and all the hydraulic devices designed to transfer fluids.

  • An exhaust system for the process fluids used during the operations performed, with different exhaust lines for fluids that are mutually incompatible.

  • A system for the circulation of deionized water or other service fluid, to be used for cleaning and rinsing operations.

  • A system of devices and compartments for the collection of accidental spills of process fluids in the operation, and any loss of fluids from the transfer lines and distribution.

  • A process chamber with a worktop, on which the dosing stations of the fluids are arranged.

  • A suction chamber to capture any fumes emitted in the use of the process fluids during the operations inside the process chamber.

  • A device for the partial or total closure of the process chamber, on the side of the operator’s access, in order to optimize the aspiration of the fumes.

  • Additional devices for the security of the entire hood.

  • A pneumatic system for actuating the pumps and the pneumatic valves of the transfer and metering fluids system.

  • An electrical system for the feeding of all the pneumatic devices and auxiliaries that require it.

  • An automatic and programmable control system to support the management of the entire hood, with a user interface.

 

The FMAL Wet Benches are also constituted by a structure in which are obtained the following rooms, arranged from bottom to top:

  • A compartment for the chemical distribution system, composed of six independent lines of fluid transfer.

  • A compartment housing the pneumatic system for actuating the pumps and the pneumatic valves of the transfer system and dosing fluids.

  • A compartment housing the auxiliary devices adapted to perform the required operations; the compartment is also predisposed for the material collection of accidental spills of process fluids in the operating phases, which are conveyed in the exhaust system.

  • A compartment of the process chamber, in which are provided the process fluids, and are performed the operations provided based on the specific intended use.

 

* under patent

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